人物貢獻(xiàn)
自1986年到中國(guó)科學(xué)院上海光機(jī)所工作后,一直從事光學(xué)薄膜技術(shù)與光電信息功能薄膜的研究工作,涉及薄膜的沉積技術(shù)、監(jiān)控技術(shù)以及薄膜的光學(xué)特性和物理特性的研究與發(fā)展。在軟x射線多層膜、大尺寸高強(qiáng)度激光薄膜、光通訊薄膜有比較深入的研究。其中1994年1月至1995年1月在英國(guó)Reading University的J J Thomson物理實(shí)驗(yàn)室,作為訪問(wèn)學(xué)者從事超薄膜生長(zhǎng)特性的研究;1998年7月至1999年6月作為國(guó)際理論物理中心TRIL項(xiàng)目獎(jiǎng)學(xué)金獲得者,在意大利國(guó)家研究委員會(huì)下屬的博洛尼亞LAMEL研究所從事半導(dǎo)體材料特性的研究工作。
現(xiàn)有的課題包括“神光Ⅲ大尺寸高強(qiáng)度激光薄膜的研制”、“軟x射線多層膜光學(xué)元件的研制”、“光學(xué)薄膜的激光損傷機(jī)理的研究”、“Develop titanium nitride base coatings with higher electrical conductivity and spectral selectivity”(項(xiàng)目與新加坡公司合作課題)、光通訊用“無(wú)色散DWDM光學(xué)薄膜的研制”(該項(xiàng)目與美國(guó)公司合作課題)、“投影電視用光學(xué)薄膜研究與開(kāi)發(fā)”(該項(xiàng)目與英國(guó)公司合作課題)等。
牽頭的”大尺寸高性能激光偏振薄膜元件成套制備工藝技術(shù)及應(yīng)用”項(xiàng)目,從基礎(chǔ)研究出發(fā),提出并貫徹了激光薄膜全流程控制的系統(tǒng)工程解決方案,攻克了基板加工、鍍膜和檢測(cè)相關(guān)系列關(guān)鍵技術(shù)難題,成功研制出大尺寸高性能激光偏振薄膜元件,打破了西方的技術(shù)封鎖和高端產(chǎn)品禁運(yùn)。上海光機(jī)所是獨(dú)立掌握從加工到鍍膜全工藝流程技術(shù)的研發(fā)機(jī)構(gòu),研制的大尺寸偏振薄膜元件已成功應(yīng)用于我國(guó)神光系列激光裝置,并出口俄羅斯、以色列等國(guó),滿足了我國(guó)激光聚變研究的重大戰(zhàn)略需求,并推動(dòng)了我國(guó)激光薄膜和相關(guān)行業(yè)的技術(shù)進(jìn)步。
個(gè)人榮譽(yù)
是《中國(guó)激光》《光學(xué)精密機(jī)械工程》期刊編委,2002年度上海市科學(xué)技術(shù)委員會(huì)科技預(yù)見(jiàn)專家,中國(guó)光學(xué)學(xué)會(huì)薄膜專業(yè)委員會(huì)委員、上海市激光學(xué)會(huì)光學(xué)薄膜專業(yè)委員會(huì)主任。發(fā)表論文300余篇,是國(guó)際激光破壞會(huì)議國(guó)際組委會(huì)成員、環(huán)太平洋高功率激光破壞和激光材料國(guó)際會(huì)議主席,《中國(guó)激光》《光學(xué)精密機(jī)械工程》等期刊編委,中國(guó)光學(xué)學(xué)會(huì)光學(xué)材料專業(yè)委員會(huì)主任委員、上海市激光學(xué)會(huì)副理事長(zhǎng)。獲得過(guò)國(guó)家技術(shù)發(fā)明獎(jiǎng)二等獎(jiǎng),國(guó)防科技進(jìn)步獎(jiǎng)二等獎(jiǎng)、中國(guó)科學(xué)院科技進(jìn)步獎(jiǎng)二等獎(jiǎng)以及上海市科技進(jìn)步二等獎(jiǎng)。
2015-09-22-今,國(guó)際玻璃協(xié)會(huì)“Coating of glass”(TC24)委員,
2010-06-06-今,國(guó)際OIC會(huì)議的2010年會(huì)議的組織委員會(huì)委員,
2009-12-01-今,中科院上海光機(jī)所技術(shù)委員會(huì), 副主任
2008-09-27-今,美國(guó)Boulder激光破壞年會(huì)組織委員會(huì)委員
獎(jiǎng)勵(lì)信息
(1) 2012863804201,二等獎(jiǎng),部委級(jí),2012
(2) “十一五”國(guó)家科技計(jì)劃執(zhí)行突出貢獻(xiàn)獎(jiǎng),部委級(jí),2011
(3) 國(guó)防科技工業(yè)協(xié)作配套先進(jìn)個(gè)人,部委級(jí),2006
(4) 神光Ⅲ大尺寸高強(qiáng)度激光薄膜的研制,三等獎(jiǎng),省級(jí),2003
專利成果
(1) 夾具三維運(yùn)動(dòng)的控制裝置,發(fā)明,2007,第2作者,專利號(hào):ZL200410018497.6
(2) 離子束流密度和能量的同步測(cè)量裝置,發(fā)明,2008,第3作者,專利號(hào):ZL200720075175.4
(3) 加快鍍膜機(jī)真空室達(dá)到高真空度的方法,發(fā)明,2009,第5作者,專利號(hào):ZL200610030790.3
(4) 離子束流密度和能量的同步測(cè)量裝置,發(fā)明,2009,第3作者,專利號(hào):ZL200710046649.7
(5) 提高光學(xué)薄膜激光損傷閾值的鍍膜方法,發(fā)明,2007,第3作者,專利號(hào):ZL200410066749.2
(6) 光學(xué)膜厚監(jiān)控系統(tǒng),發(fā)明,2008,第4作者,專利號(hào):ZL200510024987.1
(7) 透反型斬光器,發(fā)明,2007,第4作者,專利號(hào):ZL200410093016.8
(8) 鍍膜夾具的計(jì)算機(jī)控制裝置,發(fā)明,2007,第3作者,專利號(hào):ZL200410084247.2
(9) 計(jì)算機(jī)控制鍍膜裝置,發(fā)明,2008,第5作者,專利號(hào):ZL200510026448.1
(10) 雙波長(zhǎng)激光同時(shí)輻照光學(xué)薄膜損傷閾值測(cè)量裝置和方法,發(fā)明,2010,第4作者,專利號(hào):CN201010126608.0
(11) 真空鍍膜機(jī)中修正擋板的自動(dòng)切換裝置,發(fā)明,2007,第5作者,專利號(hào):ZL200410084405.4
(12) 米量級(jí)光學(xué)元件的超高精度加工方法,發(fā)明,2013,第5作者,專利號(hào):201310554717.6
(13) 提高薄膜光譜性能的膜厚監(jiān)控方法,發(fā)明,2012,第4作者,專利號(hào):ZL201110094660.7
(14) 偏振無(wú)關(guān)1550納米波長(zhǎng)高衍射效率雙層透射光柵,發(fā)明,2013,第5作者,專利號(hào):CN103364855A
(15) 梯形金屬介質(zhì)膜寬帶脈沖壓縮光柵,發(fā)明,2013,第5作者,專利號(hào):201310544973.7
(16) 磷酸鹽激光玻璃元件平行斜面間距離的測(cè)量裝置,發(fā)明,2013,第5作者,專利號(hào):103162594A
(17) 光控-晶控綜合膜厚監(jiān)控系統(tǒng),發(fā)明,2013,第4作者,專利號(hào):201310451684.2
(18) 一種新型磁流變液回收管,發(fā)明,2013,第5作者,專利號(hào):201310428700.6
(19) 改善球面光學(xué)元件鍍膜均勻性的擋板的設(shè)計(jì)方法,發(fā)明,2013,第4作者,專利號(hào):201310684126.0
(20) 一種用于加工非球面的柔性自適應(yīng)型拋光小工具,發(fā)明,2015,第3作者,專利號(hào):201510149319.5
(21) 多層介質(zhì)膜截止濾光片組合器件,發(fā)明,2013,第4作者,專利號(hào):201310596720.4
(22) 全頻段高精度非球面光學(xué)元件的加工方法,發(fā)明,2015,第1作者,專利號(hào):201510149320.8
發(fā)表論文
(1) Beam modulation caused by the plasma scalds in the multilayer dielectric films,Optics Letters,2015,第5作者
(2) Impact of substrate pits on laser-induced damage performance of 1064-nm high-reflective coatings,Optics Letters,2015,第5作者
(3) Defect analysis of UV high-reflective coatings used in the high power laser system,Optics Express,2015,第5作者
(4) Mitigation of scattering defect and absorption of DKDP crystals by laser conditioning,Optics Express,2015,第5作者
(5) Moisture absorption characteristics of a SiO2 film from 2 to 3 μm,Chinese Optics Letters ,2015,第4作者
(6) Real-time surface figure monitoring of optical elements in continuous polishing,Chinese Optics Letters ,2015,第5作者
(7) Postprocessing treatments to improve the laser damage resistance of fused silica optical surfaces and SiO2 coatings,Chinese Optics Letters,2015,第5作者
(8) Modeling the effect of nanosecond laser conditioning on the femtosecond laser-induced damage of optical films,Optics Express ,2015,第5作者
(9) Influence of SiO2 overcoat layer and electric field distribution on laser damage threshold and damage morphology of transport mirror coatings,Optics Communications,2014,第5作者
(10) CO2 laser mitigation of the ultraviolet laser damage site on a fused silica surface,Optical Engineering,2014,第5作者
(11) Nanosecond laser pulse induced concentric surface structures on SiO2 layer,Optics Express,2014,第5作者
(12) 1064 nm nanosecond laser induced concentric rings and periodic ripples structures at the exit surface of fused silica,Applied Surface Science,2014,第5作者
(13) Novel theory analysis and new perspective on angular selectivity, Optics Communications, Optics Communications,2014,第5作者
(14) Fabry-Perot filter constructed with anisotropic space layer and isotropic mirrors,J. Opt. Soc. Korea,2013,第4作者
(15) Design and fabrication of broadband chirped Mirror pair,ACTA PHYSICA SINICA,2013,第2作者
(16) Effect of Advanced Plasma Source bias voltage on properties of HfO2 films prepared by plasma ion assisted electron evaporation from metal hafnium, Thin Solid Films,2013,第5作者
(17) Method of mitigation laser-damage growth on fused silica surface,Applied Optics.,2013,第5作者
(18) Real-time damage event imaging reveals the absorber inducing laser damage with low density in solgel antireflective coatings,J. Opt. Soc. Am. B,2013,第3作者
(19) Ultrashort laser-driven stable-buckling of blisters in chirped mirror,Appl. Phys. Lett.,2013,第3作者
(20) Influence of adsorption kinetics on stress evolution in magnetron-sputtered SiO2 and SiNx films,Journal of Applied Physics,2013,第4作者
(21) Reaction mechanism and the effects of additives on the polishing of phosphate laser glass,Optical Engineering,2013,第5作者
(22) Influence of composition and seed dimension on the structure and laser damage of nodular defects in HfO2/SiO2 high reflectors,Appl. Opt. ,2012,第4作者
(23) Effect of nanosecond laser pre-irradiation on the femtosecond laser-induced damage of Ta2O5/SiO2 high reflector,Appl. Opt.,2012,第5作者
(24) Stress evolution in HfO2/SiO2 multilayers,Thin Solid Films,2012,第4作者
(25) Effects of substrate temperatures and deposition rates on properties of aluminum fluoride thin films in deep-ultraviolet region, Applied Optics,2012,第5作者
(26) Laser conditioning of high-reflective and anti-reflective coatings in vacuum environments,Opt. Commun,2010,第4作者
(27) Optimization design of an ultrabroadband, high-efficiency, all-dielectricgrating,Optics Letters,2010,第3作者
(28) Studies of laser damage morphology reveal subsurface feature in fused silica,Surface and Interface,2010,第5作者
(29) 基于泄漏模共振的多層介質(zhì)膜光柵寬角譜特性實(shí)現(xiàn),物理學(xué)報(bào),2010,第4作者
(30) The coupling effect of simultaneous multi-wavelength irradiation on multilayer thin-films,Optics Communications,2010,第2作者
(31) Further Investigation on the Damage Characteristic of nodular defects,Applied Optics,2010,第5作者
(32) Guided-mode resonances in multimode planar periodic waveguides,Chinese Optics Letters,2010,第3作者
(33) Effect of two organic contamination modes on laser-induced damage of high reflective films in vacuum,Thin Solid Films,2010,第3作者
(34) Design and analysis of different types of dispersion mirrors,Chinese Optics Letters,2010,第2作者
(35) Calculation of femtosecond pulse laser induced damage threshold for broadband antireflective microstructure arrays,Opt. Exp.,2009,第2作者
(36) Effect of multiple wavelengths combination on laser-induced damage in multilayer mirrors,Opt. Exp.,2009,第2作者
(37) Nonpolarizing guided-mode resonance filter,Optics Letters ,2009,第3作者
(38) Damage performance of thin-film beam splitter for third harmonic separation under simultaneous exposure to 1ω and 3ω pulses,Optics Communications ,2009,第2作者
(39) Investigation of the errors of thickness and refractive index in manufacturing Gires-Tournois interferometer negative-dispersion mirrors,J. Opt. A: Pure and Applied Optics,2009,第2作者
(40) Thermal-mechanical modeling of nodular defect embedded within multilayer coatings,J. Vac. Sci. Technol. A,2009,第2作者
(41) Study on the layer structure of W/Cmultilayers deposited by magnetron sputtering using x-ray reflectivity,Surface and Interface Analysis,2008,第3作者
(42) Mechanism initiated by nanoabsorber for UV nanosecond-pulse-driven damage of dielectric coatings,Opt. Exp,2008,第2作者
(43) Enhancement of near-band edge photoluminescence of ZnO thin films in sandwich configuration at room temperature,Journal of Applied physics,2006,第2作者
發(fā)表著作
Pacific Rim Laser Damage 2011, Optical Materials for High-Power Lasers, SPIE, 2012-02, 第 1 作者
Pacific Rim Laser Damage 2013, Optical Materials for High-Power Lasers, SPIE, 2013-07, 第 1 作者
( 3 ) 光學(xué)薄膜及其應(yīng)用, Optial oatings and its application, 上海交通大學(xué)出版社, 2014-02, 第 2 作者
( 4 ) 激光誘導(dǎo)材料損傷(第六節(jié)), Laser-induced Damage in Optical Materials(chapter 6), CRC Press, 2014-09, 第 1 作者
Pacific Rim Laser Damage 2014, Optical Materials for High-Power Lasers, SPIE, 2014-10, 第 2 作者
Pacific Rim Laser Damage 2015, Optical Materials for High-power Lasers, SPIE, 2015-08, 第 1 作者
科研項(xiàng)目
( 1 ) 基底亞表面缺陷對(duì)激光薄膜的性能影響及其表征與控制, 主持, 國(guó)家級(jí), 2009-01--2011-12
( 2 ) 非常規(guī)光學(xué)零部件檢測(cè)裝置與鍍膜工藝研發(fā), 主持, 國(guó)家級(jí), 2011-01--2013-10
( 3 ) XXX元器件攻關(guān)計(jì)劃協(xié)調(diào)課題, 主持, 國(guó)家級(jí), 2010-01--2018-12
( 4 ) 光學(xué)元器件攻關(guān)計(jì)劃, 主持, 國(guó)家級(jí), 2016-01--2018-12
( 5 ) 國(guó)家重大專項(xiàng)條件建設(shè), 主持, 國(guó)家級(jí), 2013-12--2018-12
( 6 ) 重大專項(xiàng)光學(xué)元器件攻關(guān)計(jì)劃, 主持, 國(guó)家級(jí), 2010-01--2015-12