科研成就
主要研究方向?yàn)閼?yīng)用微系統(tǒng)、微機(jī)電系統(tǒng)設(shè)計(jì)、微型傳感器等。在流動(dòng)測(cè)控靈巧蒙皮、MEMS集成設(shè)計(jì)等領(lǐng)域做出創(chuàng)新貢獻(xiàn)。主持國(guó)家自然科學(xué)基金、863計(jì)劃/目標(biāo)導(dǎo)向類、國(guó)防基礎(chǔ)研究計(jì)劃、航空科學(xué)基金、總裝預(yù)研基金、橫向課題等項(xiàng)目10項(xiàng)。合作出版專著1部,被教育部遴選推薦為研究生教學(xué)用書,參編教材2部。發(fā)表論文50多篇,SCI/EI收錄40篇。授權(quán)發(fā)明專利3項(xiàng)。作為國(guó)家公派訪問學(xué)者,在德國(guó)從事為期1年的歐盟納米科技第五框架計(jì)劃項(xiàng)目研究,曾在香港從事微技術(shù)合作研究。
發(fā)表論文
1.Binghe Ma, Chengyu Ma, A MEMS surface fence for wall shear stress measurement with high sensitivity,Microsystem Technologies, 2016(22): 239-246,SCI/EI
2.Binghe Ma, Jinzhong Ren, Jinjun Deng, and Weizheng Yuan, Flexible Thermal Sensor Array on PI Film Substrate for Underwater Applications,The 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, EI/ISTP
3.Binghe Ma, Keynote speech, Wall shear stress measurement: From sensors to instrumentation. April 10, 2015,IEEE-NEMS 2015, The 10th IEEE international conference on Nano/Micro engineered and molecular systems.
4.Pengfei Zhu, Binghe Ma*, Chengyu Jiang, Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement,Microsystem Technologies, 2015(21):785-789, SCI/EI
5.Fang Ye, Binghe Ma*, Jie Gao, Li Xie, Chen Wei, Jin Jiang, Fabrication of polyHEMA grids by micromolding in capillaries for cell patterning and single-cell arrays,Journal of Biomedical Materials Research Part B: Applied Biomaterials, 2015(103): 1375u20131380, SCI/EI
6.Chengyu Ma, Binghe Ma*, Jinjun Deng and Xinhang Jin, A Study of Directional MEMS Dual-fences Gauge,A study of directional MEMS dual-fences gauge,Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on, 2015, Pages:449u2013452, SCI/EI
7.Xinhang Jin,Binghe Ma*,Jinjun Deng,Chengyu Ma,High temperature thin film thermocouples on different ceramic substrates,Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on, 2015, Pages:183-186
8.Shushan Wang,Binghe Ma,Jinjun Deng,Hongdong Qu,Jian Luo, Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film,Microsystem Technologies, 2015 (21):1053-1059
9. Xiaoying Li, Yanbing Li, Binghe Ma, Leitao Wang, Modelling and calibration of microthermal sensor for underwater wall shear stress measurement,Micro & Nano Letters, 2014(9): 486u2013489
主研方向
主要從事微機(jī)電系統(tǒng)(MEMS)、微傳感器技術(shù)研究,承擔(dān)工程測(cè)試技術(shù)等教學(xué)工作。在面向三航的先進(jìn)流動(dòng)測(cè)控微系統(tǒng)、微機(jī)電系統(tǒng)設(shè)計(jì)等領(lǐng)域做出了創(chuàng)新性研究貢獻(xiàn)。主持承擔(dān)了國(guó)家自然科學(xué)基金、863計(jì)劃/目標(biāo)導(dǎo)向類等科研項(xiàng)目。合作出版專著1部,參編教材2部。發(fā)表論文50多篇,獲得授權(quán)發(fā)明專利10余項(xiàng)。曾在德國(guó)漢諾威大學(xué)從事為期1年的歐盟框架納米計(jì)劃項(xiàng)目研究,在香港城市大學(xué)從事微技術(shù)合作研究等。
獲獎(jiǎng)情況
獲得國(guó)家技術(shù)發(fā)明二等獎(jiǎng)2項(xiàng)、省部級(jí)科技獎(jiǎng)7項(xiàng)。
獲得省部級(jí)科技獎(jiǎng)7項(xiàng),包括教育部技術(shù)發(fā)明一等獎(jiǎng)1項(xiàng)、國(guó)防科學(xué)技術(shù)二等獎(jiǎng)3項(xiàng)。
社會(huì)職務(wù)
擔(dān)任西北工業(yè)大學(xué)機(jī)電學(xué)院副院長(zhǎng)、陜西省微/納米系統(tǒng)重點(diǎn)實(shí)驗(yàn)室副主任,以及中國(guó)機(jī)械工程學(xué)會(huì)生產(chǎn)工程分會(huì)青年工作委員會(huì)委員、中國(guó)刀協(xié)切削先進(jìn)技術(shù)研究會(huì)委員兼西北分會(huì)秘書長(zhǎng)等。